Nota de FísicaPublicado
Atomic Force Microscopy Investigation on the Effects of Annealing on Amorphous Carbon Nitride Films Deposited by rf-Magnetron Sputtering
R. Prioli; S.I. Zanette; Anibal Omar Caride; M.M. Lacerda; F. L. Freire Jr
1998
Datos de la publicación
- Autores
- R. Prioli; S.I. Zanette; Anibal Omar Caride; M.M. Lacerda; F. L. Freire Jr
- Tipo
- Nota de Física
- Estado
- Publicado
- Fecha de publicación
- 1998
- Descripción
- Atomic Force Microscopy was used to study the effects of thermal annealing on the surface topography and the tribological properties of amorphous carbon nitride thin films deposited by rf-magnetron sputtering. The results show that the surface roughness decreases with the increase of the annealing temperature. The friction coefficients at the interface between a <math>Si_3N_4\,\!</math> tip and the amorphous carbon nitride films surface decrease with increasing smoothness of the surface.
- Año
- 1998
- Número
- CBPF-NF-035/98
- Vínculo con tesis
- No
- Vínculo con beca
- No