---
title: "SU-8 processing improvement and simulating studies for a Micromegas detector fabrication • CBPF Index"
description: "CBPF INDEX is the system that tracks the scientific and technological output of CBPF. It lists the articles, books, technical reports and other publications of the whole CBPF community."
canonical_url: "https://index.cbpf.br/en/publicacoes/6ad2a767639f62b11adbd4e1"
locale: en
meta:
  "og:description": "CBPF INDEX is the system that tracks the scientific and technological output of CBPF. It lists the articles, books, technical reports and other publications of the whole CBPF community."
  "og:image": "https://index.cbpf.br/_og/d/c_Item%2Ctitulo_SU-8%2Bprocessing%2Bimprovement%2Band%2Bsimulating%2Bstudies%2Bfor%2Ba%2BMicromegas%2Bdetector%2Bfabrication%2Ctipo_Journal%2Barticle%2Ccor_~IzAwNThiMA%2Cautores_~SGVybWFuIFBlc3NvYSBMaW1hIErDum5pb3I7IFNBTVBBSU8sIE0uRi47IFAuUi5CLiBNYXJpbmhvOyBDQUJSVUpBLCBFLjsgTE9aQU5PLCBNLjsgREUgQ0FNUE9TLCBKLkIu%2Cdetalhe_~MTIvMTEvMjAyMQ%2Csecao_Publications%2Cp_Ii9lbi9wdWJsaWNhY29lcy82YWQyYTc2NzYzOWY2MmIxMWFkYmQ0ZTEi%2Cs_pMvCxJ28FehKTS7E.png"
  "og:image:height": "600"
  "og:image:type": image/png
  "og:image:width": "1200"
  "og:title": "SU-8 processing improvement and simulating studies for a Micromegas detector fabrication • CBPF Index"
  "twitter:image": "https://index.cbpf.br/_og/d/c_Item%2Ctitulo_SU-8%2Bprocessing%2Bimprovement%2Band%2Bsimulating%2Bstudies%2Bfor%2Ba%2BMicromegas%2Bdetector%2Bfabrication%2Ctipo_Journal%2Barticle%2Ccor_~IzAwNThiMA%2Cautores_~SGVybWFuIFBlc3NvYSBMaW1hIErDum5pb3I7IFNBTVBBSU8sIE0uRi47IFAuUi5CLiBNYXJpbmhvOyBDQUJSVUpBLCBFLjsgTE9aQU5PLCBNLjsgREUgQ0FNUE9TLCBKLkIu%2Cdetalhe_~MTIvMTEvMjAyMQ%2Csecao_Publications%2Cp_Ii9lbi9wdWJsaWNhY29lcy82YWQyYTc2NzYzOWY2MmIxMWFkYmQ0ZTEi%2Cs_pMvCxJ28FehKTS7E.png"
---

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**Journal article****Published**

# **SU-8 processing improvement and simulating studies for a Micromegas detector fabrication**

**Herman Pessoa Lima Júnior; SAMPAIO, M.F.; P.R.B. Marinho; CABRUJA, E.; LOZANO, M.; DE CAMPOS, J.B.**

11/12/2021P08022 -

[**Contact owner**](mailto:denise@cbpf.br?subject=SU-8%20processing%20improvement%20and%20simulating%20studies%20for%20a%20Micromegas%20detector%20fabrication)

## **Publication details**

<dl>

<dt>Authors</dt>
<dd>Herman Pessoa Lima Júnior; SAMPAIO, M.F.; P.R.B. Marinho; CABRUJA, E.; LOZANO, M.; DE CAMPOS, J.B.</dd>

<dt>Type</dt>
<dd>Journal article</dd>

<dt>Status</dt>
<dd>Published</dd>

<dt>Publication date</dt>
<dd>12/11/2021</dd>

<dt>Journal</dt>
<dd>Journal of Instrumentation</dd>

<dt>Volume</dt>
<dd>16</dd>

<dt>Year</dt>
<dd>2021</dd>

<dt>Pages</dt>
<dd>P08022 -</dd>

<dt>DOI</dt>
<dd>http://dx.doi.org/10.1088/1748-0221/16/08/p08022</dd>

<dt>Scope</dt>
<dd>International</dd>

<dt>Indexed in the Science Citation Index</dt>
<dd>Yes</dd>

<dt>Linked to a thesis</dt>
<dd>No</dd>

<dt>Linked to a grant</dt>
<dd>No</dd>

</dl>

```json
{"@context":"https://schema.org","@graph":[{"@id":"https://index.cbpf.br/en#website","@type":"WebSite","description":"O CBPF INDEX é o sistema de acompanhamento da produção científica e tecnológica do CBPF. Nele é possível obter a lista de publicações de artigos, livros, relatórios técnicos, etc de toda a comunidade do CBPF.","inLanguage":"en-US","name":"CBPF Index","url":"https://index.cbpf.br/en","publisher":{"@id":"https://index.cbpf.br/#identity"},"translationOfWork":{"@id":"https://index.cbpf.br/#website"}},{"@id":"https://index.cbpf.br/en/publicacoes/6ad2a767639f62b11adbd4e1#webpage","@type":"WebPage","description":"CBPF INDEX is the system that tracks the scientific and technological output of CBPF. It lists the articles, books, technical reports and other publications of the whole CBPF community.","name":"SU-8 processing improvement and simulating studies for a Micromegas detector fabrication","url":"https://index.cbpf.br/en/publicacoes/6ad2a767639f62b11adbd4e1","isPartOf":{"@id":"https://index.cbpf.br/en#website"},"potentialAction":[{"@type":"ReadAction","target":["https://index.cbpf.br/en/publicacoes/6ad2a767639f62b11adbd4e1"]}],"primaryImageOfPage":{"@id":"https://index.cbpf.br/#logo"}},{"@id":"https://index.cbpf.br/#identity","@type":"Organization","alternateName":"CBPF","description":"Unidade de pesquisa do Ministério da Ciência, Tecnologia e Inovação dedicada à pesquisa básica em Física, suas aplicações e à formação científica.","email":"web@cbpf.br","legalName":"Centro Brasileiro de Pesquisas Físicas/CBPF","name":"Centro Brasileiro de Pesquisas Físicas","taxID":"04.044.443/0001-35","telephone":"+55-21-2141-7100","url":"https://cbpf.br","address":{"@type":"PostalAddress","streetAddress":"Rua Dr. Xavier Sigaud, 150","addressLocality":"Rio de Janeiro","addressRegion":"RJ","postalCode":"22290-180","addressCountry":"BR"},"logo":{"@id":"https://index.cbpf.br/#logo"},"sameAs":["https://twitter.com/cbpf_mcti"]},{"@id":"https://index.cbpf.br/#logo","@type":"ImageObject","caption":"Centro Brasileiro de Pesquisas Físicas","contentUrl":"https://index.cbpf.br/icon-512x512-light.png","inLanguage":"en-US","url":"https://index.cbpf.br/icon-512x512-light.png"}]}
```

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