---
title: "Control and automation of an Opposing Magnetron RF Sputtering system to produce nanometric thin -lms • CBPF Index"
description: "CBPF INDEX is the system that tracks the scientific and technological output of CBPF. It lists the articles, books, technical reports and other publications of the whole CBPF community."
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> Index of every page on this site: [llms.txt](https://index.cbpf.br/llms.txt)

**Journal article****Published**

# **Control and automation of an Opposing Magnetron RF Sputtering system to produce nanometric thin -lms**

**A. Mello; H. Sendão**

20141 - 11

[**Contact owner**](mailto:denise@cbpf.br?subject=Control%20and%20automation%20of%20an%20Opposing%20Magnetron%20RF%20Sputtering%20system%20to%20produce%20nanometric%20thin%20-lms)

## **Publication details**

<dl>

<dt>Authors</dt>
<dd>A. Mello; H. Sendão</dd>

<dt>Type</dt>
<dd>Journal article</dd>

<dt>Status</dt>
<dd>Published</dd>

<dt>Publication date</dt>
<dd>2014</dd>

<dt>Journal</dt>
<dd>Notas Técnicas do CBPF</dd>

<dt>Volume</dt>
<dd>4</dd>

<dt>Year</dt>
<dd>2014</dd>

<dt>Pages</dt>
<dd>1 - 11</dd>

<dt>DOI</dt>
<dd>http://dx.doi.org/10.7437/NT2236-7640/2014.04.001</dd>

<dt>Scope</dt>
<dd>National</dd>

<dt>Indexed in the Science Citation Index</dt>
<dd>No</dd>

<dt>Linked to a thesis</dt>
<dd>No</dd>

<dt>Linked to a grant</dt>
<dd>No</dd>

</dl>

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