Journal articlePublished
Control and automation of an Opposing Magnetron RF Sputtering system to produce nanometric thin -lms
A. Mello; H. Sendão
20141 - 11
Publication details
- Authors
- A. Mello; H. Sendão
- Type
- Journal article
- Status
- Published
- Publication date
- 2014
- Journal
- Notas Técnicas do CBPF
- Volume
- 4
- Year
- 2014
- Pages
- 1 - 11
- DOI
- http://dx.doi.org/10.7437/NT2236-7640/2014.04.001
- Scope
- National
- Indexed in the Science Citation Index
- No
- Linked to a thesis
- No
- Linked to a grant
- No