Conference
2005 Spring Meeting - Material Research Society
Joice Terra, Donald E. Ellis, Z. Hong, L. Luan, Rossi, A.M., A. Mello, Jean-Guillaume Eon, J. Ketterson
2005
Abstract
We have produced hydroxyapatite (HA) thin films on fused silica using R.F. magnetron sputtering from two facing targets in a right angle geometry. This design greatly reduces negative-ion resputtering effects caused by oxyanions, and thus preserves the stoichiometry by the targets. We study both a
Event details
- Event type
- Conference
- Year
- 2005
- Participation
- No
- Presentation
- Oral presentation
- Paper title
- Hydroyapatite Thin Films Produced by Radio Frequency Magnetrom Sputtering from Two facing Targets
- Funding agencies
- —
- Collaborators
- Joice Terra, Donald E. Ellis, Z. Hong, L. Luan, Rossi, A.M., A. Mello, Jean-Guillaume Eon, J. Ketterson